defect n. 1.缺陷,缺点,弱点;短处。 2.不足,缺乏。 have some defect in eyesight 目力不佳。 have the defects of one's qualities 美中不足之处。 in defect of 若无…时;因无。 vi. 叛变;逃走。 He defected to the West. 他叛逃到西方。
pattern n. 1.模范,榜样;典范。 2.型,模型;模式;雏型;【冶金】原型。 3.花样;式样;(服装裁剪的)纸样;图案,图谱,图表;机构,结构;特性曲线;晶体点阵;(电视的)帧面图像。 4.方式;形式;格局;格调。 5.(衣料等的)样品,样本,样板。 6.〔美国〕一件衣料。 7.(炮弹等的)散布面;靶子上的弹痕。 8.(飞机的)着陆航线。 a pattern wife 模范妻子。 a paper pattern for a dress 女服纸样。 a machine of a new [an old] pattern新[旧]型机器。 a cropping pattern农作制。 after the pattern of 仿…。 vt. 1.照图样做;仿造,摹制 (after; upon)。 2.给…加花样,用图案装饰。 3.〔英方〕与…相比 (to, with)。 vi. 形成图案。 pattern oneself after 模仿,学…的榜样。 adj. -ed 仿造的;被组成图案的(patterned forms【语言学】 仿造词)。 n. -ing 图案结构,图形;(行为等的)特有型式。 adj. -less 无图案的。
The study results obtained by afm suggest that the flow pattern defects were revealed as having wedge shape and there were small octahedron voids surrounded by { 111 } which were the same as cops and lstds planes were observed at the tips of flow pattern defects 用原子力显微镜对fpds结构的研究结果表明, fpds缺陷形如抛物线,并且在其端部存在有和cops 、 lstds缺陷相同的由{ 111 }面构成的八面体空洞。
In this paper , the flow pattern defects ( fpds ) were revealed by secco etchant and their shape , distribution on wafer and tip structure were studied in details by optical microscope and atomic force microscope ( afm ) . the relationship between etching time and the tip structure of fpds was also discussed . furthermore , by studying the effect of rapid thermal annealing ( rta ) on the density of fpds in ar , the annihilation mechanism of fpds was discussed in this paper 本文将cz硅单晶片在secco腐蚀液中择优腐蚀后,用光学显微镜和原子力显微镜对流动图形缺陷( flowpatterndefects , fpds )在硅片中的形态、分布及其端部的微观结构进行了仔细地观察和研究,并讨论了腐蚀时间对fpds缺陷端部结构的影响;本文还通过研究ar气氛下快速退火( rapidthermalannealing , rta )对fpds缺陷密度的影响,初步探讨了fpds的消除机理。